MEMS Reliability
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
| Autor: | Hartzell, Allyson L. Shea, Herbert R. da Silva, Mark G. |
|---|---|
| ISBN: | 9781441960177 |
| Sprache: | Englisch |
| Seitenzahl: | 291 |
| Produktart: | Gebunden |
| Verlag: | Springer US |
| Veröffentlicht: | 11.11.2010 |
| Schlagworte: | MEMS MEMS reliability design for reliability design strategies failure analysis failure mechanisms packaging and testing process development and characterization |
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