Sputtering by Particle Bombardment III
Characteristics of Sputtered Particles, Technical Applications
Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.
| ISBN: | 9783662311042 |
|---|---|
| Sprache: | Englisch |
| Seitenzahl: | 415 |
| Produktart: | Kartoniert / Broschiert |
| Herausgeber: | Behrisch, Rainer Wittmaack, Klaus |
| Verlag: | Springer Berlin |
| Veröffentlicht: | 23.08.2014 |
| Untertitel: | Characteristics of Sputtered Particles, Technical Applications |
| Schlagworte: | Sputtering Teilchenphysik energy material materials science physics production research surface analysis plasma technology thin-film deposition spectrometry |
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